About TCW
Product Features
- Composed of 2- to 12-inch wafers and thermocouples (TC Wafer)
- Accurately measure the temperature of the equipment platform
- Multi-point distributed measurement equipment has a temperature uniformity (1~34ea) and a heating rate that can reach 35℃/s.
- Temperature range: -200~1250℃
- Third-party laboratories authorized by International Laboratory Accreditation (ILAC) use TAF/ANAB as the calibration standard.
- Flexible customization
Verification service
- ILAC / ANAB Certification Service
- The third-party laboratory has over 50 years of knowledge and experience, utilizing a global network of ISO 17025 certified NIST traceable calibration laboratories and support offices.
- And simplify your calibration workflow with industry-leading calibration services and solutions.
Product Description
- We offer customized temperature measurement tools to ensure the quality of your products.
- We have a professional development team, extensive process experience, and professional measurement tool verification and manufacturing capabilities.
- Techtronic Engineering has developed its own thermocouple temperature sensor, which is calibrated by a third-party laboratory authorized by the International Laboratory Accreditation Association (ILAC) according to TAF/ANAB standards. The product uses one or more temperature sensing points on the wafer surface to obtain temperature measurements at these specific locations, thereby helping users to calibrate the temperature of process equipment according to this measurement standard, and at the same time monitor the uniformity of ambient temperature.
- Main applications: RTP, OVEN, REFLOW, HOT PLATE, CVD, PVD, SPUTTERING, OTHER PROCESS
Standard Specification Options
Product Composition
Application | Wire Group | L2 Wire Material | |||
L1 | L2 | L3 | |||
RTP | 1 | 300 | 100 | 600 | Polyimide |
2 | 600 | 100 | 600 | ||
Reflow | 3 | 0 | 300 | 500 | Teflon |
4 | 1000 | 0 | 0 | ||
5 | 6000 | 0 | 0 | ||
CVD/PVD | 6 | 300 | 150 | 1000 | Polyimide |
7 | 700 | 400 | 1000 | ||
Oven | 8 | 1000 | 300 | 2000 | Teflon |
9 | 2000 | 300 | 2000 | ||
Coater/ | 10 | 200 | 200 | 2000 | Polyimide |
11 | 2000 | 200 | 1800 | ||
12 | 500 | 100 | 1000 | ||
Type | Diameter (mm) | Working Temperature (°C) | Accuracy |
R/S | 0.127 | 1200 | ±1.5°C or ±0.25% (MT) |
0.254 | 1250 | ||
K | 0.127 | 700 | ±1.1°C or ±0.4% (MT) |
0.3 | 900 | ||
T | 0.127 | 400 | ±0.5°C or ±0.1% (MT) |
